JPH0432525U - - Google Patents
Info
- Publication number
- JPH0432525U JPH0432525U JP7537090U JP7537090U JPH0432525U JP H0432525 U JPH0432525 U JP H0432525U JP 7537090 U JP7537090 U JP 7537090U JP 7537090 U JP7537090 U JP 7537090U JP H0432525 U JPH0432525 U JP H0432525U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- ion exchange
- cleaning solution
- exchange resin
- cleaning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7537090U JPH0432525U (en]) | 1990-07-16 | 1990-07-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7537090U JPH0432525U (en]) | 1990-07-16 | 1990-07-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0432525U true JPH0432525U (en]) | 1992-03-17 |
Family
ID=31615895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7537090U Pending JPH0432525U (en]) | 1990-07-16 | 1990-07-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0432525U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0263586A (ja) * | 1988-08-27 | 1990-03-02 | Nec Corp | 洗浄装置 |
-
1990
- 1990-07-16 JP JP7537090U patent/JPH0432525U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0263586A (ja) * | 1988-08-27 | 1990-03-02 | Nec Corp | 洗浄装置 |